Inventor
KO WU HUNG
TW8 patents
⚠️ This page may combine multiple inventors who share the name “KO WU HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS11809076B2Nov 7, 2023
Cleaning method, method for forming semiconductor structure and system thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12153341B2Nov 26, 2024
Cleaning method, method for forming semiconductor structure and system thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11703752B2Jul 18, 2023
Method of accelerated hazing of mask assembly
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11347143B2May 31, 2022
Cleaning method, method for forming semiconductor structure and system thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10983430B2Apr 20, 2021
Mask assembly and haze acceleration method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US9726990B2Aug 8, 2017
Lithography mask repair methods
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49