P

Inventor

ZACH FRANZ XAVER

US9 patents
⚠️ This page may combine multiple inventors who share the name “ZACH FRANZ XAVER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

4 patents
US6961920B2Nov 1, 2005

Method for interlayer and yield based optical proximity correction

IBM61 citations94
US7334212B2Feb 19, 2008

Method for interlayer and yield based optical proximity correction

IBM8 citations72
US7712069B2May 4, 2010

Method for interlayer and yield based optical proximity correction

IBM2 citations61
US7861209B2Dec 28, 2010

Method for interlayer and yield based optical proximity correction

IBM0 citations50

CADENCE DESIGN SYSTEMS INC

2 patents
US7882456B2Feb 1, 2011

Optical lithography correction process

CADENCE DESIGN SYSTEMS INC150 citations97
US7536670B2May 19, 2009

Method for verifying and choosing lithography model

CADENCE DESIGN SYSTEMS INC11 citations80

INVARIUM INC

2 patents
US7392502B2Jun 24, 2008

Method for real time monitoring and verifying optical proximity correction model and method

INVARIUM INC16 citations81
US7224437B2May 29, 2007

Method for measuring and verifying stepper illumination

INVARIUM INC5 citations61

ZACH FRANZ XAVER

1 patent
US8141008B2Mar 20, 2012

Optical lithography correction process

ZACH FRANZ XAVER7 citations78