Inventor
UNRUH PAUL R
US4 patents
⚠️ This page may combine multiple inventors who share the name “UNRUH PAUL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
3 patentsUS7119909B2Oct 10, 2006
Film thickness and boundary characterization by interferometric profilometry
VEECO INSTR INC39 citations90
US6552806B1Apr 22, 2003
Automated minimization of optical path difference and reference mirror focus in white-light interference microscope objective
VEECO INSTR INC37 citations88
US7283250B2Oct 16, 2007
Measurement of object deformation with optical profiler
VEECO INSTR INC10 citations81