Inventor
NOVAK ERIK L
US5 patents
⚠️ This page may combine multiple inventors who share the name “NOVAK ERIK L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
4 patentsUS7119909B2Oct 10, 2006
Film thickness and boundary characterization by interferometric profilometry
VEECO INSTR INC39 citations90
US7283250B2Oct 16, 2007
Measurement of object deformation with optical profiler
VEECO INSTR INC10 citations81
US7212356B2May 1, 2007
Mounting mechanism for compensating optics in interferometer
VEECO INSTR INC2 citations60
US7654685B2Feb 2, 2010
Variable-wavelength illumination system for interferometry
VEECO INSTR INC6 citations58