Inventor
KISTLER RODNEY
US20 patents
Patents
20 patentsUS7010468B2Mar 7, 2006
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
LAM RES CORP16 citations92
US6984892B2Jan 10, 2006
Semiconductor structure implementing low-K dielectric materials and supporting stubs
LAM RES CORP23 citations92
US6929531B2Aug 16, 2005
System and method for metal residue detection and mapping within a multi-step sequence
LAM RES CORP23 citations92
US6808590B1Oct 26, 2004
Method and apparatus of arrayed sensors for metrological control
LAM RES CORP31 citations92
US6579157B1Jun 17, 2003
Polishing pad ironing system and method for implementing the same
LAM RES CORP19 citations92
US7128803B2Oct 31, 2006
Integration of sensor based metrology into semiconductor processing tools
LAM RES CORP28 citations89
US6653224B1Nov 25, 2003
Methods for fabricating interconnect structures having Low K dielectric properties
LAM RES CORP26 citations89
US7309618B2Dec 18, 2007
Method and apparatus for real time metal film thickness measurement
LAM RES CORP10 citations84
US6540587B1Apr 1, 2003
Infrared end-point detection system
LAM RES CORP15 citations84
US7425501B2Sep 16, 2008
Semiconductor structure implementing sacrificial material and methods for making and implementing the same
LAM RES CORP5 citations74
US7084621B2Aug 1, 2006
Enhancement of eddy current based measurement capabilities
LAM RES CORP10 citations74
US6951624B2Oct 4, 2005
Method and apparatus of arrayed sensors for metrological control
LAM RES CORP5 citations74
US6859765B2Feb 22, 2005
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
LAM RES CORP7 citations73
US6937915B1Aug 30, 2005
Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
LAM RES CORP11 citations72
US6925348B2Aug 2, 2005
Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
LAM RES CORP9 citations72
US7205166B2Apr 17, 2007
Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
LAM RES CORP8 citations70
US7875548B2Jan 25, 2011
Method for making semiconductor structures implementing sacrificial material
LAM RES CORP1 citations63
US6922053B2Jul 26, 2005
Complementary sensors metrological process and method and apparatus for implementing the same
LAM RES CORP2 citations63
US6894491B2May 17, 2005
Method and apparatus for metrological process control implementing complementary sensors
LAM RES CORP4 citations63
US6896596B2May 24, 2005
Polishing pad ironing system
LAM RES CORP5 citations62