Inventor
JOHNS TIMOTHY P
US10 patents
⚠️ This page may combine multiple inventors who share the name “JOHNS TIMOTHY P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
6 patentsUS7071105B2Jul 4, 2006
Method of polishing a silicon-containing dielectric
CABOT MICROELECTRONICS CORP57 citations95
US7442645B2Oct 28, 2008
Method of polishing a silicon-containing dielectric
CABOT MICROELECTRONICS CORP25 citations92
US7585340B2Sep 8, 2009
Polishing composition containing polyether amine
CABOT MICROELECTRONICS CORP19 citations91
US7531105B2May 12, 2009
Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios
CABOT MICROELECTRONICS CORP28 citations91
US7504044B2Mar 17, 2009
Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios
CABOT MICROELECTRONICS CORP11 citations83
US7677956B2Mar 16, 2010
Compositions and methods for dielectric CMP
CABOT MICROELECTRONICS CORP2 citations57