Inventor
NETSU SHIGEYOSHI
JP44 patents
⚠️ This page may combine multiple inventors who share the name “NETSU SHIGEYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
25 patentsUS10377636B2Aug 13, 2019
Method for producing polycrystalline silicon rod, polycrystalline silicon rod, and polycrystalline silicon mass
SHINETSU CHEMICAL CO3 citations72
US9274069B2Mar 1, 2016
Method for evaluating degree of crystalline orientation of polycrystalline silicon, method for selecting polycrystalline silicon rod, polycrystalline silicon rod, polycrystalline silicon ingot, and method for manufacturing monocrystalline silicon
SHINETSU CHEMICAL CO3 citations72
US10611635B2Apr 7, 2020
Hydrogen gas recovery system and hydrogen gas separation and recovery method
SHINETSU CHEMICAL CO1 citations63
US12060277B2Aug 13, 2024
Method for producing polycrystalline silicon
SHINETSU CHEMICAL CO0 citations62
US11440804B2Sep 13, 2022
Process for producing polycrystalline silicon mass
SHINETSU CHEMICAL CO0 citations62
US11167994B2Nov 9, 2021
Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal silicon
SHINETSU CHEMICAL CO1 citations62
US12162762B2Dec 10, 2024
Polycrystalline silicon rod
SHINETSU CHEMICAL CO0 citations61
US11242620B2Feb 8, 2022
Polycrystalline silicon rod and method for producing polycrystalline silicon rod
SHINETSU CHEMICAL CO0 citations61
US11230796B2Jan 25, 2022
Resin material, vinyl bag, polycrystalline silicon rod, polycrystalline silicon mass
SHINETSU CHEMICAL CO0 citations51
US10914021B2Feb 9, 2021
Polycrystalline silicon rod and method for producing single crystal silicon
SHINETSU CHEMICAL CO0 citations51
US10870581B2Dec 22, 2020
Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and polycrystalline silicon rod or polycrystalline silicon ingot
SHINETSU CHEMICAL CO0 citations51
US10858259B2Dec 8, 2020
Reactor for polycrystalline silicon production and method for producing polycrystalline silicon
SHINETSU CHEMICAL CO0 citations51
US10858258B2Dec 8, 2020
Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and polycrystalline silicon rod or polycrystalline silicon ingot
SHINETSU CHEMICAL CO0 citations51
US10800659B2Oct 13, 2020
Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal silicon
SHINETSU CHEMICAL CO0 citations51
US10366882B2Jul 30, 2019
System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon
SHINETSU CHEMICAL CO0 citations51
US10343922B2Jul 9, 2019
Polycrystalline silicon rod, production method therefor, and FZ silicon single crystal
SHINETSU CHEMICAL CO0 citations51
US10066320B2Sep 4, 2018
Polycrystalline silicon, FZ single crystal silicon, and method for producing the same
SHINETSU CHEMICAL CO0 citations51
US9437429B2Sep 6, 2016
Polycrystalline silicon manufacturing apparatus and polycrystalline silicon manufacturing method
SHINETSU CHEMICAL CO1 citations51
US9328429B2May 3, 2016
Method for evaluating degree of crystal orientation in polycrystalline silicon, selection method for polycrystalline silicon rods, and production method for single crystal silicon
SHINETSU CHEMICAL CO0 citations51
US10865498B2Dec 15, 2020
Polycrystalline silicon rod, method for producing polycrystalline silicon rod, and single-crystalline silicon
SHINETSU CHEMICAL CO0 citations50
US10760180B2Sep 1, 2020
Polycrystalline silicon ingot, polycrystalline silicon bar, and method for producing single crystal silicon
SHINETSU CHEMICAL CO0 citations50
US10207932B2Feb 19, 2019
Trichlorosilane purification system and method for producing polycrystalline silicon
SHINETSU CHEMICAL CO0 citations46
US9263261B2Feb 16, 2016
Method for supplying source gas for producing polycrystalline silicon and polycrystalline silicon
SHINETSU CHEMICAL CO0 citations41
US9394606B2Jul 19, 2016
Production method for polycrystalline silicon, and reactor for polycrystalline silicon production
SHINETSU CHEMICAL CO0 citations40
US10584035B2Mar 10, 2020
Purification system of trichlorosilane and silicon crystal
SHINETSU CHEMICAL CO0 citations36
SHINETSU HANDOTAI KK
7 patentsUS5186192AFeb 16, 1993
Apparatus for cleaning silicon wafer
SHINETSU HANDOTAI KK58 citations93
US7582221B2Sep 1, 2009
Wafer manufacturing method, polishing apparatus, and wafer
SHINETSU HANDOTAI KK33 citations92
US5538465AJul 23, 1996
Elastic foamed sheet and wafer-polishing jig using the sheet
SHINETSU HANDOTAI KK21 citations89
US5409770AApr 25, 1995
Elastic foamed sheet and wafer-polishing jig using the sheet
SHINETSU HANDOTAI KK23 citations89
US6099748AAug 8, 2000
Silicon wafer etching method and silicon wafer etchant
SHINETSU HANDOTAI KK20 citations84
US6787797B2Sep 7, 2004
Semiconductor wafer and device for semiconductor device manufacturing process
SHINETSU HANDOTAI KK12 citations73
US7203559B2Apr 10, 2007
Method for manufacturing semiconductor wafer, method for receiving order for manufacture of semiconductor wafer, and system for receiving order for manufacture of semiconductor wafer
SHINETSU HANDOTAI KK4 citations60
NETSU SHIGEYOSHI
5 patentsUS9193596B2Nov 24, 2015
Reactor for producing polycrystalline silicon, system for producing polycrystalline silicon, and process for producing polycrystalline silicon
NETSU SHIGEYOSHI2 citations60
US9017482B2Apr 28, 2015
System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon
NETSU SHIGEYOSHI2 citations60
US9006002B2Apr 14, 2015
Polycrystalline silicon rod and method for manufacturing polycrystalline silicon rod
NETSU SHIGEYOSHI2 citations60
US8793853B2Aug 5, 2014
Core wire holder for producing polycrystalline silicon and method for producing polycrystalline silicon
NETSU SHIGEYOSHI1 citations48
US9562289B2Feb 7, 2017
Carbon electrode with slidable contact surfaces and apparatus for manufacturing polycrystalline silicon rod
NETSU SHIGEYOSHI0 citations34
PRE TECH CO LTD
3 patentsUS5725753AMar 10, 1998
Apparatus and method for cleaning semiconductor wafers
PRE TECH CO LTD55 citations95
US6003527ADec 21, 1999
Cleaning apparatus and a cleaning method
PRE TECH CO LTD61 citations94
US5733434AMar 31, 1998
Apparatus and method for cleaning semiconductor wafers
PRE TECH CO LTD83 citations92
KUROSAWA YASUSHI
2 patentsUS9416444B2Aug 16, 2016
Apparatus for producing polycrystalline silicon and method for producing polycrystalline silicon
KUROSAWA YASUSHI0 citations37
US9126242B2Sep 8, 2015
Method for cleaning bell jar, method for producing polycrystalline silicon, and apparatus for drying bell jar
KUROSAWA YASUSHI0 citations36