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Inventor
OTSUKI SHIGEO
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “OTSUKI SHIGEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
2 patents
US7672799B2
Mar 2, 2010
Defect inspection apparatus and defect inspection method
HITACHI HIGH TECH CORP
11 citations
83
US7953567B2
May 31, 2011
Defect inspection apparatus and defect inspection method
HITACHI HIGH TECH CORP
2 citations
61
NODA HIROYUKI
1 patent
US8664588B2
Mar 4, 2014
Mass spectrometer
NODA HIROYUKI
2 citations
58
JGC CORP
1 patent
US12105033B2
Oct 1, 2024
Inspection system, determination processing apparatus, and inspection method
JGC CORP
0 citations
39