Inventor
DREW MITCHELL
US9 patents
⚠️ This page may combine multiple inventors who share the name “DREW MITCHELL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
5 patentsUS10600665B2Mar 24, 2020
Substrate processing apparatus
BROOKS AUTOMATION INC4 citations84
US10325795B2Jun 18, 2019
Substrate processing apparatus
BROOKS AUTOMATION INC7 citations84
US9852935B2Dec 26, 2017
Substrate processing apparatus
BROOKS AUTOMATION INC4 citations84
US9230841B2Jan 5, 2016
Substrate processing apparatus
BROOKS AUTOMATION INC8 citations84
US11195738B2Dec 7, 2021
Substrate processing apparatus
BROOKS AUTOMATION INC0 citations62