Inventor
PARK JAE YEOL
US9 patents
⚠️ This page may combine multiple inventors who share the name “PARK JAE YEOL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOREA ADVANCED INST SCI & TECH
2 patentsPARK JAE-YEOL
2 patentsSAMSUNG ELECTRONICS CO LTD
2 patentsUS9761441B2Sep 12, 2017
Physical vapor deposition methods and systems to form semiconductor films using counterbalance magnetic field generators
SAMSUNG ELECTRONICS CO LTD0 citations39
US9380692B2Jun 28, 2016
Apparatus and arrangements of magnetic field generators to facilitate physical vapor deposition to form semiconductor films
SAMSUNG ELECTRONICS CO LTD0 citations39
KIM JIN HYUN
2 patentsUS8956516B2Feb 17, 2015
System and apparatus to facilitate physical vapor deposition to modify non-metal films on semiconductor substrates
KIM JIN HYUN0 citations36
US8936703B2Jan 20, 2015
Methods to fabricate non-metal films on semiconductor substrates using physical vapor deposition
KIM JIN HYUN0 citations36