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Inventor
MIYAMA RYO
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “MIYAMA RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
2 patents
US12506000B2
Dec 23, 2025
Method of filling gap with flowable carbon layer
ASM IP HOLDING BV
0 citations
59
US11705333B2
Jul 18, 2023
Structures including multiple carbon layers and methods of forming and using same
ASM IP HOLDING BV
0 citations
59
TOKYO ELECTRON LTD
2 patents
US10074550B2
Sep 11, 2018
Plasma stability determination method and plasma processing apparatus
TOKYO ELECTRON LTD
0 citations
49
US9659752B2
May 23, 2017
Method for presetting tuner of plasma processing apparatus and plasma processing apparatus
TOKYO ELECTRON LTD
0 citations
32