Inventor
Amthor Julia
DE7 patents
Patents
7 patentsUS10029911B2Jul 24, 2018
Micromechanical component including a diffusion stop channel
BOSCH GMBH ROBERT4 citations71
US9890035B2Feb 13, 2018
Method for manufacturing a micromechanical component
BOSCH GMBH ROBERT4 citations71
US10017375B2Jul 10, 2018
Structures for reducing and preventing stress and tensions during processing of silicon with the aid of melting by a laser
BOSCH GMBH ROBERT2 citations69
US10023460B2Jul 17, 2018
Structures for reducing and avoiding stresses on the seal bottom side during laser reseal
BOSCH GMBH ROBERT1 citations50
US11084716B2Aug 10, 2021
Stress reduction during laser resealing through a temperature increase
BOSCH GMBH ROBERT0 citations48
US10000375B2Jun 19, 2018
Structures and process for preventing a projection of the laser resealing structure beyond the wafer surface
BOSCH GMBH ROBERT0 citations40
US10183861B2Jan 22, 2019
Laser reseal including a protective structure
BOSCH GMBH ROBERT0 citations39