Inventor

HAM BOO-HYUN

KR5 patents

⚠️ This page may combine multiple inventors who share the name “HAM BOO-HYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US10643888B2May 5, 2020

Overlay marks, methods of forming the same, and methods of fabricating semiconductor devices using the same

SAMSUNG ELECTRONICS CO LTD1 citations60

US10553429B2Feb 4, 2020

Method of forming pattern of semiconductor device

SAMSUNG ELECTRONICS CO LTD1 citations60

US10276373B2Apr 30, 2019

Method of manufacturing a semiconductor device

SAMSUNG ELECTRONICS CO LTD1 citations57

KIM JONG-SU

1 patent

US9711395B2Jul 18, 2017

Overlay marks, methods of forming the same, and methods of fabricating semiconductor devices using the same

KIM JONG-SU2 citations70

LEE HYUNCHANG

1 patent

US9704721B2Jul 11, 2017

Method of forming key patterns and method of fabricating a semiconductor device using the same

LEE HYUNCHANG4 citations58