Inventor
YASUTAKE Yosuke
JP6 patents
Patents
6 patentsUS11380562B2Jul 5, 2022
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations59
US12538753B2Jan 27, 2026
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10727091B2Jul 28, 2020
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10438821B2Oct 8, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US12293935B2May 6, 2025
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations44
US11839893B2Dec 12, 2023
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations44