Inventor
LEESON MICHAEL J
US8 patents
⚠️ This page may combine multiple inventors who share the name “LEESON MICHAEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
7 patentsUS6991893B2Jan 31, 2006
Controlling resist profiles through substrate modification
INTEL CORP20 citations92
US7241707B2Jul 10, 2007
Layered films formed by controlled phase segregation
INTEL CORP22 citations90
US7169620B2Jan 30, 2007
Method of reducing the surface roughness of spin coated polymer films
INTEL CORP4 citations72
US7427559B2Sep 23, 2008
Method of reducing the surface roughness of spin coated polymer films
INTEL CORP2 citations61
US10269622B2Apr 23, 2019
Materials and deposition schemes using photoactive materials for interface chemical control and patterning of predefined structures
INTEL CORP0 citations51
US7800203B2Sep 21, 2010
Method of reducing the surface roughness of spin coated polymer films
INTEL CORP0 citations51
US10692757B2Jun 23, 2020
Means to decouple the diffusion and solubility switch mechanisms of photoresists
INTEL CORP0 citations45