Inventor
MURAKAMI SEIRO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MURAKAMI SEIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
9 patentsUS6608681B2Aug 19, 2003
Exposure method and apparatus
NIKON CORP171 citations99
US6433872B1Aug 13, 2002
Exposure method and apparatus
NIKON CORP99 citations99
US5883704AMar 16, 1999
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system
NIKON CORP183 citations99
US5693439ADec 2, 1997
Exposure method and apparatus
NIKON CORP117 citations99
US5448332ASep 5, 1995
Exposure method and apparatus
NIKON CORP705 citations99
US5739899AApr 14, 1998
Projection exposure apparatus correcting tilt of telecentricity
NIKON CORP92 citations96
US5464715ANov 7, 1995
Method of driving mask stage and method of mask alignment
NIKON CORP59 citations96
US4860374AAug 22, 1989
Apparatus for detecting position of reference pattern
NIKON CORP109 citations96
US6894763B2May 17, 2005
Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same
NIKON CORP15 citations83
NIPPON KOGAKU KK
5 patentsUS4677301AJun 30, 1987
Alignment apparatus
NIPPON KOGAKU KK90 citations96
USRE38320ENov 18, 2003
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system
NIPPON KOGAKU KK20 citations92
US4702606AOct 27, 1987
Position detecting system
NIPPON KOGAKU KK30 citations92
US4655598AApr 7, 1987
Position detection method and apparatus
NIPPON KOGAKU KK41 citations92
USRE38113EMay 6, 2003
Method of driving mask stage and method of mask alignment
NIPPON KOGAKU KK13 citations84