Inventor

XIAO MANCHAO

US104 patents

⚠️ This page may combine multiple inventors who share the name “XIAO MANCHAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

XIAO MANCHAO

AIR PROD & CHEM

Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants

Halogenated organoaminosilane precursors and methods for depositing films comprising same

Precursors for depositing silicon containing films and processes thereof

Process for producing silicon and oxide films from organoaminosilane precursors

Process for producing silicon oxide films for organoaminosilane precursors

Methods for depositing films with organoaminodisilane precursors

Tellurium precursors for GST films in an ALD or CVD process

Precursors for CVD silicon carbo-nitride films

Precursors for CVD silicon carbo-nitride and silicon nitride films

Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants

Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane

Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane

Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films

Precursors for CVD silicon carbo-nitride films

Methods to prepare silicon-containing films

High temperature atomic layer deposition of silicon oxide thin films

Methods of forming non-oxygen containing silicon-based films

Alkoxyaminosilane compounds and applications thereof

Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants

Cyclic chemical vapor deposition of metal-silicon containing films

Precursors for depositing silicon containing films

Organometallic complexes and their use as precursors to deposit metal films

Method of making a multicomponent film

High temperature atomic layer deposition of silicon oxide thin films

AZA-polysilane precursors and methods for depositing films comprising same

Organoaminosilanes and methods for making same

Organoaminosilanes and methods for making same

VERSUM MAT US LLC

Precursors and flowable CVD methods for making low-K films to fill surface features

Organoaminosilane precursors and methods for depositing films comprising same

Compositions and methods using same for carbon doped silicon containing films

Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films

Organoaminosilane precursors and methods for depositing films comprising same

Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films

Alkoxysilylamine compounds and applications thereof

Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films

Compositions and methods using same for deposition of silicon-containing films

Organoaminosilanes and methods for making same

XIAO MANCHAO

Organoaminosilane precursors and methods for making and using same

Organoaminosilane precursors and methods for depositing films comprising same

Process for producing silicon and oxide films from organoaminosilane precursors

Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanes

Antimony precursors for GST films in ALD/CVD processes

Organoaminosilane precursors and methods for making and using same

Method of making a multicomponent film

Binary and ternary metal chalcogenide materials and method of making and using same

YANG LIU

Low temperature deposition of silicon-containing films

Dielectric films comprising silicon and methods for making same

CHENG HANSONG

Precursors for depositing silicon-containing films and methods for making and using same

THRIDANDAM HAREESH

Plasma enhanced cyclic chemical vapor deposition of silicon-containing films

BEHM PHILIP E

Cylinder surface treated container for monochlorosilane