Inventor
SAGOU SATORU
JP3 patents
Patents
3 patentsUS6222195B1Apr 24, 2001
Charged-particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD49 citations96
US6137111AOct 24, 2000
Charged particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD26 citations92
US5830612ANov 3, 1998
Method of detecting a deficiency in a charged-particle-beam exposure mask
FUJITSU LTD28 citations92