Inventor

TREUR RANDOLPH E

US15 patents

⚠️ This page may combine multiple inventors who share the name “TREUR RANDOLPH E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

14 patents

US6578853B1Jun 17, 2003

Chuck assembly for use in a spin, rinse, and dry module and methods for making and implementing the same

LAM RES CORP79 citations97

US7170190B1Jan 30, 2007

Apparatus for oscillating a head and methods for implementing the same

LAM RES CORP21 citations92

US7087122B2Aug 8, 2006

Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same

LAM RES CORP20 citations92

US6848194B2Feb 1, 2005

Apparatus for monitoring a semiconductor wafer during a spin drying operation

LAM RES CORP17 citations92

US6827092B1Dec 7, 2004

Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same

LAM RES CORP25 citations92

US6488568B1Dec 3, 2002

Angular spin, rinse, and dry module and methods for making and implementing the same

LAM RES CORP9 citations73

US6558964B2May 6, 2003

Method and apparatus for monitoring a semiconductor wafer during a spin drying operation

LAM RES CORP9 citations73

US6481447B1Nov 19, 2002

Fluid delivery ring and methods for making and implementing the same

LAM RES CORP2 citations62

US7494550B2Feb 24, 2009

Fluid delivery ring and methods for making and implementing the same

LAM RES CORP0 citations51

US7040017B2May 9, 2006

Methods for making and implementing fluid delivery ring

LAM RES CORP0 citations51

US7029539B2Apr 18, 2006

Angular spin, rinse, and dry module and methods for making and implementing the same

LAM RES CORP1 citations51

STRASBAUGH INC

1 patent

US6146242ANov 14, 2000

Optical view port for chemical mechanical planarization endpoint detection

STRASBAUGH INC118 citations97

TREUR RANDOLPH E

LAM RES CORP

Chuck assembly for use in a spin, rinse, and dry module and methods for making and implementing the same

Apparatus for oscillating a head and methods for implementing the same

Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same

Apparatus for monitoring a semiconductor wafer during a spin drying operation

Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same

Optical view port for chemical mechanical planarization endpoint detection

Method and apparatus for megasonic cleaning with reflected acoustic waves

Megasonic substrate processing module

Angular spin, rinse, and dry module and methods for making and implementing the same

Method and apparatus for monitoring a semiconductor wafer during a spin drying operation

Fluid delivery ring and methods for making and implementing the same

Fluid delivery ring and methods for making and implementing the same

Methods for making and implementing fluid delivery ring

Angular spin, rinse, and dry module and methods for making and implementing the same

STRASBAUGH INC

Optical view port for chemical mechanical planarization endpoint detection