Inventor
KAGA HIROYASU
JP18 patents
⚠️ This page may combine multiple inventors who share the name “KAGA HIROYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
12 patentsUS7005651B2Feb 28, 2006
Liquid metal ion gun
HITACHI HIGH TECH CORP12 citations92
US7420181B2Sep 2, 2008
Liquid metal ion gun
HITACHI HIGH TECH CORP10 citations84
US7956336B2Jun 7, 2011
Focused ion beam apparatus
HITACHI HIGH TECH CORP7 citations83
US7323697B2Jan 29, 2008
Wafer alignment method for dual beam system
HITACHI HIGH TECH CORP10 citations83
US7804073B2Sep 28, 2010
Liquid metal ion gun
HITACHI HIGH TECH CORP5 citations73
US7211805B2May 1, 2007
Liquid metal ion gun
HITACHI HIGH TECH CORP8 citations73
US7189982B2Mar 13, 2007
Focused ion beam apparatus and aperture
HITACHI HIGH TECH CORP8 citations73
US7705329B2Apr 27, 2010
Charged particle beam processing apparatus
HITACHI HIGH TECH CORP2 citations62
US7435972B2Oct 14, 2008
Focused ion beam apparatus and liquid metal ion source
HITACHI HIGH TECH CORP2 citations62
US7573049B2Aug 11, 2009
Wafer alignment method for dual beam system
HITACHI HIGH TECH CORP2 citations61
US7601971B2Oct 13, 2009
Charged beam gun
HITACHI HIGH TECH CORP0 citations52
US7667209B2Feb 23, 2010
Focused ION beam apparatus
HITACHI HIGH TECH CORP1 citations51