Inventor
GOEDL GERNOT
DE3 patents
Patents
3 patentsUS6972832B1Dec 6, 2005
Method of grounding a photoblank to a holding device
INFINEON TECHNOLOGIES AG0 citations40
US6821693B2Nov 23, 2004
Method for adjusting a multilevel phase-shifting mask or reticle
INFINEON TECHNOLOGIES AG0 citations37
US6830873B2Dec 14, 2004
Method for adjusting and expposing the second level of a phase-shift mask
INFINEON TECHNOLOGIES AG0 citations26