Inventor
DRANEY NATHAN R
US7 patents
Patents
7 patentsUS7064069B2Jun 20, 2006
Substrate thinning including planarization
MICRON TECHNOLOGY INC45 citations95
US6940181B2Sep 6, 2005
Thinned, strengthened semiconductor substrates and packages including same
MICRON TECHNOLOGY INC45 citations95
US6762074B1Jul 13, 2004
Method and apparatus for forming thin microelectronic dies
MICRON TECHNOLOGY INC55 citations94
US7427811B2Sep 23, 2008
Semiconductor substrate
MICRON TECHNOLOGY INC8 citations73
US7056812B2Jun 6, 2006
Process for strengthening semiconductor substrates following thinning
MICRON TECHNOLOGY INC5 citations73
US6882036B2Apr 19, 2005
Apparatuses for forming thin microelectronic dies
MICRON TECHNOLOGY INC8 citations72
US7262488B2Aug 28, 2007
Substrate with enhanced properties for planarization
MICRON TECHNOLOGY INC4 citations62