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Inventor
CHI SHIAW-LIN
TW
2 patents
Patents
2 patents
US7142938B2
Nov 28, 2006
Manufacturing management system and method
TAIWAN SEMICONDUCTOR MFG
9 citations
65
US7127317B2
Oct 24, 2006
System and method to analyze low yield of wafers caused by abnormal lot events
TAIWAN SEMICONDUCTOR MFG
4 citations
51