Inventor

HIEBERT STEPHEN

US4 patents

⚠️ This page may combine multiple inventors who share the name “HIEBERT STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

2 patents

US6917421B1Jul 12, 2005

Systems and methods for multi-dimensional inspection and/or metrology of a specimen

KLA TENCOR TECH CORP67 citations92

US7126699B1Oct 24, 2006

Systems and methods for multi-dimensional metrology and/or inspection of a specimen

KLA TENCOR TECH CORP91 citations91

KLA TENCOR CORP

1 patent

US10599951B2Mar 24, 2020

Training a neural network for defect detection in low resolution images

KLA TENCOR CORP19 citations80

KLA CORP

1 patent

US12372345B2Jul 29, 2025

3D profilometry with a Linnik interferometer

KLA CORP0 citations50