Inventor
WANG DAIMIAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “WANG DAIMIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS9348214B2May 24, 2016
Spectral purity filter and light monitor for an EUV reticle inspection system
KLA TENCOR CORP2 citations61
US9151718B2Oct 6, 2015
Illumination system with time multiplexed sources for reticle inspection
KLA TENCOR CORP0 citations51
US9151881B2Oct 6, 2015
Phase grating for mask inspection system
KLA TENCOR CORP1 citations51
US9453801B2Sep 27, 2016
Photoemission monitoring of EUV mirror and mask surface contamination in actinic EUV systems
KLA TENCOR CORP1 citations50
AMAZON TECH INC
3 patentsUS12353211B1Jul 8, 2025
System for movement outside of sensor field of view by an autonomous mobile device
AMAZON TECH INC2 citations69
US11989026B1May 21, 2024
Speed control system for an autonomous mobile device
AMAZON TECH INC1 citations61
US11960288B1Apr 16, 2024
System for path planning in areas outside of sensor field of view by an autonomous mobile device
AMAZON TECH INC0 citations47