Inventor
LIU YANWEI
US12 patents
⚠️ This page may combine multiple inventors who share the name “LIU YANWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
8 patentsUS8941336B1Jan 27, 2015
Optical characterization systems employing compact synchrotron radiation sources
KLA TENCOR CORP29 citations93
US8749179B2Jun 10, 2014
Optical characterization systems employing compact synchrotron radiation sources
KLA TENCOR CORP22 citations91
US9335206B2May 10, 2016
Wave front aberration metrology of optics of EUV mask inspection system
KLA TENCOR CORP8 citations84
US9875534B2Jan 23, 2018
Techniques and systems for model-based critical dimension measurements
KLA TENCOR CORP3 citations71
US10074036B2Sep 11, 2018
Critical dimension uniformity enhancement techniques and apparatus
KLA TENCOR CORP6 citations70
US9778205B2Oct 3, 2017
Delta die and delta database inspection
KLA TENCOR CORP1 citations51
US9151881B2Oct 6, 2015
Phase grating for mask inspection system
KLA TENCOR CORP1 citations51
US9453801B2Sep 27, 2016
Photoemission monitoring of EUV mirror and mask surface contamination in actinic EUV systems
KLA TENCOR CORP1 citations50