Inventor
KUO TENG-CHIN
TW5 patents
Patents
5 patentsUS9482964B2Nov 1, 2016
Overlap mark set and method for selecting recipe of measuring overlap error
UNITED MICROELECTRONICS CORP4 citations72
US9305884B1Apr 5, 2016
Overlay mark and method for forming the same
UNITED MICROELECTRONICS CORP2 citations61
US9400435B2Jul 26, 2016
Method of correcting overlay error
UNITED MICROELECTRONICS CORP2 citations60
US9448471B2Sep 20, 2016
Photo-mask and method of manufacturing semiconductor structures by using the same
UNITED MICROELECTRONICS CORP0 citations51
US9494873B2Nov 15, 2016
Asymmetry compensation method used in lithography overlay process
UNITED MICROELECTRONICS CORP0 citations50