Inventor
LIM GISEUB
CN3 patents
Patents
3 patentsUS10478849B2Nov 19, 2019
Nozzle auto-cleaning device and nozzle auto-cleaning method
BOE TECHNOLOGY GROUP CO LTD4 citations70
US10758945B2Sep 1, 2020
Liquid knife, liquid knife cleaning apparatus and liquid knife assembly apparatus
BOE TECHNOLOGY GROUP CO LTD0 citations35
US10049906B1Aug 14, 2018
Substrate processing apparatus
BOE TECHNOLOGY GROUP CO LTD0 citations35