Inventor
NATARAJAN SRIVIDYA
US4 patents
Patents
4 patentsUS11965241B2Apr 23, 2024
Cluster tools, systems, and methods having one or more pressure stabilization chambers
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Method for forming silicon-phosphorous materials
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US11649560B2May 16, 2023
Method for forming silicon-phosphorous materials
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US10170321B2Jan 1, 2019
Aluminum content control of TiAIN films
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