Inventor
TERAMOTO YUSUKE
JP11 patents
Patents
11 patentsUS7626188B2Dec 1, 2009
Light source device for producing extreme ultraviolet radiation and method of generating extreme ultraviolet radiation
USHIO ELECTRIC INC17 citations81
US9480136B2Oct 25, 2016
Extreme UV radiation light source device
USHIO ELECTRIC INC10 citations80
US10672584B2Jun 2, 2020
X-ray generator
USHIO ELECTRIC INC5 citations71
US12593391B2Mar 31, 2026
Light source apparatus
USHIO ELECTRIC INC0 citations60
US12414218B2Sep 9, 2025
Light source apparatus
USHIO ELECTRIC INC0 citations60
US6982421B2Jan 3, 2006
Extreme ultraviolet source
USHIO ELECTRIC INC5 citations58
US12308200B2May 20, 2025
Light source apparatus
USHIO ELECTRIC INC0 citations49
US12250762B2Mar 11, 2025
Light source apparatus
USHIO ELECTRIC INC0 citations49
US9686846B2Jun 20, 2017
Extreme UV radiation light source device
USHIO ELECTRIC INC0 citations48
US10285253B2May 7, 2019
Discharge electrodes and light source device
USHIO ELECTRIC INC0 citations32
US10143075B2Nov 27, 2018
Device for emitting extreme ultraviolet light
USHIO ELECTRIC INC0 citations32