Inventor
NAGANO AKIHISA
JP5 patents
Patents
5 patentsUS12526908B2Jan 13, 2026
Circulation mechanism and operation apparatus
USHIO ELECTRIC INC0 citations43
US10591342B2Mar 17, 2020
Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device
USHIO ELECTRIC INC0 citations35
US10609802B2Mar 31, 2020
High-temperature plasma raw material supply apparatus and extreme ultra violet light source apparatus
USHIO ELECTRIC INC0 citations34
US10285253B2May 7, 2019
Discharge electrodes and light source device
USHIO ELECTRIC INC0 citations32
US10143075B2Nov 27, 2018
Device for emitting extreme ultraviolet light
USHIO ELECTRIC INC0 citations32