Inventor
GRZELA GRZEGORZ
NL10 patents
Patents
10 patentsUS11067902B2Jul 20, 2021
Computational metrology
ASML NETHERLANDS BV9 citations85
US10481506B2Nov 19, 2019
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV7 citations82
US11009343B2May 18, 2021
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV2 citations72
US10551750B2Feb 4, 2020
Metrology method and apparatus and associated computer product
ASML NETHERLANDS BV2 citations68
US12461451B2Nov 4, 2025
Computational metrology
ASML NETHERLANDS BV0 citations62
US11650047B2May 16, 2023
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV0 citations62
US12013647B2Jun 18, 2024
Metrology method
ASML NETHERLANDS BV0 citations59
US10310388B2Jun 4, 2019
Metrology method and apparatus and associated computer product
ASML NETHERLANDS BV1 citations57
US12112260B2Oct 8, 2024
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV0 citations50
US10474043B2Nov 12, 2019
Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations39