Inventor
BANGAR MANGESH
US5 patents
Patents
5 patentsUS10234772B2Mar 19, 2019
Overlay error correction
APPLIED MATERIALS INC5 citations80
US9343309B1May 17, 2016
Lateral oxidation process flows
APPLIED MATERIALS INC5 citations68
US11650506B2May 16, 2023
Film structure for electric field guided photoresist patterning process
APPLIED MATERIALS INC0 citations61
US10429747B2Oct 1, 2019
Hybrid laser and implant treatment for overlay error correction
APPLIED MATERIALS INC0 citations51
US9864280B2Jan 9, 2018
Overlay error correction
APPLIED MATERIALS INC1 citations48