Inventor

ADAMS BRUCE E

US60 patents

⚠️ This page may combine multiple inventors who share the name “ADAMS BRUCE E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADAMS BRUCE E

APPLIED MATERIALS INC

Dynamic surface annealing using addressable laser array with pyrometry feedback

Thermal flux laser annealing for ion implantation of semiconductor P-N junctions

Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes

Temperature measurement and control of wafer support in thermal processing chamber

Annealing apparatus using two wavelengths of radiation

Apparatus and method of improving beam shaping and beam homogenization

Annealing apparatus using two wavelengths of radiation

Apparatus including heating source reflective filter for pyrometry

High speed phase scrambling of a coherent beam using plasma

Compensation techniques for substrate heating processes

Overlay error correction

Pyrometry filter for thermal process chamber

Annealing apparatus using two wavelengths of radiation

Method and apparatus for decorrelation of spatially and temporally coherent light

Compensation techniques for substrate heating processes

Multiple band pass filtering for pyrometry in laser based annealing systems

Multiple band pass filtering for pyrometry in laser based annealing systems

Rapid detection of imminent failure in laser thermal processing of a substrate

Temperature measurement using etalons

Thermal processing apparatus

Multiple beam combiner for laser processing apparatus

Pryometer for laser annealing system compatible with amorphous carbon optical absorber layer

Etalon thermometry for plasma environments

Pyrometry filter for thermal process chamber

Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods

Dynamic optical valve for mitigating non-uniform heating in laser processing

Process sheet resistance uniformity improvement using multiple melt laser exposures

Multiple beam combiner for laser processing apparatus

Process sheet resistance uniformity improvement using multiple melt laser exposures

LUXTRON CORP

Non-contact techniques for measuring temperature or radiation-heated objects

Non-contact optical techniques for measuring surface conditions

Non-contact optical techniques for measuring surface conditions

Non-contact optical techniques for measuring surface conditions

Temperature measurement with combined photo-luminescent and black body sensing techniques

Techniques for measuring the thickness of a film formed on a substrate

Non-contact techniques for measuring temperature of radiation-heated objects

Temperature measurement with combined photo-luminescent and black body sensing techniques

MOFFATT STEPHEN

Methods of solid phase recrystallization of thin film using pulse train annealing method

Multiple beam combiner for laser processing apparatus

Thermal processing apparatus

ADAMS BRUCE E

Apparatus and method of improving beam shaping and beam homogenization

Apparatus and method of improving beam shaping and beam homogenization

PATALAY KAILASH KIRAN

Pyrometry for substrate processing

ARMSTRONG CORK CO

Heat resistant curable surface coating composition comprising the reaction product of an unsaturated polyaryloxyphosphazene and an unsaturated aryloxycyclotriphosphazene

HUNTER AARON MUIR

Particle control in laser processing systems

SADE AMIKAM

Aperture control of thermal processing radiation

JENNINGS DEAN C

Multi-stage optical homogenization

KOELMEL BLAKE R

Methods and apparatus for aligning a substrate in a process chamber

ARMSTRONG WORLD IND INC

Sag-resistant acoustic board

JENNINGS DEAN

Annealing apparatus using two wavelengths of continuous wave laser radiation