Inventor
MAYUR ABHILASH J
US71 patents
⚠️ This page may combine multiple inventors who share the name “MAYUR ABHILASH J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
38 patentsUS7429532B2Sep 30, 2008
Semiconductor substrate process using an optically writable carbon-containing mask
APPLIED MATERIALS INC539 citations99
US7422775B2Sep 9, 2008
Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealing
APPLIED MATERIALS INC535 citations99
US7335611B2Feb 26, 2008
Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layer
APPLIED MATERIALS INC535 citations99
US7323401B2Jan 29, 2008
Semiconductor substrate process using a low temperature deposited carbon-containing hard mask
APPLIED MATERIALS INC580 citations99
US7312148B2Dec 25, 2007
Copper barrier reflow process employing high speed optical annealing
APPLIED MATERIALS INC537 citations99
US7312162B2Dec 25, 2007
Low temperature plasma deposition process for carbon layer deposition
APPLIED MATERIALS INC544 citations99
US7109098B1Sep 19, 2006
Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealing
APPLIED MATERIALS INC551 citations99
US6151446ANov 21, 2000
Apparatus and method for thermally processing substrates including a processor using multiple detection signals
APPLIED MATERIALS INC443 citations99
US6987240B2Jan 17, 2006
Thermal flux processing by scanning
APPLIED MATERIALS INC183 citations98
US7494272B2Feb 24, 2009
Dynamic surface annealing using addressable laser array with pyrometry feedback
APPLIED MATERIALS INC26 citations93
US7135392B1Nov 14, 2006
Thermal flux laser annealing for ion implantation of semiconductor P-N junctions
APPLIED MATERIALS INC50 citations93
US7129440B2Oct 31, 2006
Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes
APPLIED MATERIALS INC26 citations93
US6164816ADec 26, 2000
Tuning a substrate temperature measurement system
APPLIED MATERIALS INC53 citations92
US7754518B2Jul 13, 2010
Millisecond annealing (DSA) edge protection
APPLIED MATERIALS INC15 citations91
US7078302B2Jul 18, 2006
Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal
APPLIED MATERIALS INC28 citations91
US7109087B2Sep 19, 2006
Absorber layer for DSA processing
APPLIED MATERIALS INC20 citations90
USD959490SAug 2, 2022
Display screen or portion thereof with graphical user interface
APPLIED MATERIALS INC36 citations89
US10857623B2Dec 8, 2020
Annealing apparatus using two wavelengths of radiation
APPLIED MATERIALS INC2 citations84
US9839976B2Dec 12, 2017
Annealing apparatus using two wavelengths of radiation
APPLIED MATERIALS INC3 citations84
US7674999B2Mar 9, 2010
Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing system
APPLIED MATERIALS INC11 citations84
US7875829B2Jan 25, 2011
Thermal flux processing by scanning a focused line beam
APPLIED MATERIALS INC7 citations83
US7872209B2Jan 18, 2011
Thermal flux processing by scanning a focused line beam
APPLIED MATERIALS INC8 citations83
US6260894B1Jul 17, 2001
Assembly for wafer handling system
APPLIED MATERIALS INC18 citations82
US10234772B2Mar 19, 2019
Overlay error correction
APPLIED MATERIALS INC5 citations80
US7923280B2Apr 12, 2011
Millisecond annealing (DSA) edge protection
APPLIED MATERIALS INC5 citations72
US11945045B2Apr 2, 2024
Annealing apparatus using two wavelengths of radiation
APPLIED MATERIALS INC0 citations63
US9076828B2Jul 7, 2015
Edge ring for a thermal processing chamber
APPLIED MATERIALS INC1 citations63
US7717617B2May 18, 2010
Multiple band pass filtering for pyrometry in laser based annealing systems
APPLIED MATERIALS INC3 citations63
US7438468B2Oct 21, 2008
Multiple band pass filtering for pyrometry in laser based annealing systems
APPLIED MATERIALS INC4 citations63
US7422988B2Sep 9, 2008
Rapid detection of imminent failure in laser thermal processing of a substrate
APPLIED MATERIALS INC4 citations63
US11469100B2Oct 11, 2022
Methods of post treating dielectric films with microwave radiation
APPLIED MATERIALS INC0 citations62
US9263265B2Feb 16, 2016
Crystallization of amorphous films and grain growth using combination of laser and rapid thermal annealing
APPLIED MATERIALS INC2 citations62
US9114479B2Aug 25, 2015
Managing thermal budget in annealing of substrates
APPLIED MATERIALS INC3 citations62
US7804042B2Sep 28, 2010
Pryometer for laser annealing system compatible with amorphous carbon optical absorber layer
APPLIED MATERIALS INC3 citations62
US12347679B2Jul 1, 2025
System and method for radical and thermal processing of substrates
APPLIED MATERIALS INC0 citations61
US12327763B2Jun 10, 2025
Treatment methods for titanium nitride films
APPLIED MATERIALS INC0 citations61
US11823901B2Nov 21, 2023
System and method for radical and thermal processing of substrates
APPLIED MATERIALS INC0 citations61
US7611976B2Nov 3, 2009
Gate electrode dopant activation method for semiconductor manufacturing
APPLIED MATERIALS INC3 citations61
KOELMEL BLAKE
4 patentsUS8744250B2Jun 3, 2014
Edge ring for a thermal processing chamber
KOELMEL BLAKE13 citations92
US8434937B2May 7, 2013
Method and apparatus for detecting the substrate temperature in a laser anneal system
KOELMEL BLAKE11 citations84
US8755680B2Jun 17, 2014
Edge ring for a thermal processing chamber
KOELMEL BLAKE3 citations62
US8309475B2Nov 13, 2012
Apparatus and method of aligning and positioning a cold substrate on a hot surface
KOELMEL BLAKE2 citations62
JENNINGS DEAN C
3 patentsJENNINGS DEAN
2 patentsCAREY PAUL
2 patentsMOFFATT STEPHEN
1 patentShowing the top 50 of 71 patents by PatentIndex Score.