Inventor · disambiguated record
Kazuto Obuchi
Also filed as: OBUCHI KAZUTO
5 granted patents·32 citations·filing 1992–2002
74Inventor score
Top patents by PatentIndex Score
5 records- 0156US5344536AMethod of and apparatus for processing a workpiece in plasmaTOKYO OHKA KOGYO CO LTD·Filed 1992·Granted Sep 6, 1994·18 cites·20 claims
- 0249US6770165B2Apparatus for plasma treatmentTOKYO OHKA KOGYO CO LTD·Filed 2002·Granted Aug 3, 2004·4 cites·17 claims
- 0335US5980684AProcessing apparatus for substratesTOKYO OHKA CO LTD·Filed 1997·Granted Nov 9, 1999·10 cites·3 claims
- 0433US6758222B2Processing method for substrateTOKYO OHKA KOGYO CO LTD·Filed 2002·Granted Jul 6, 2004·0 cites·5 claims
- 0532US6656323B2Plasma processing apparatusTOKYO OHKA KOGYO CO LTD·Filed 2002·Granted Dec 2, 2003·0 cites·7 claims
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