Inventor
ROUGH J KIRKWOOD H
US16 patents
⚠️ This page may combine multiple inventors who share the name “ROUGH J KIRKWOOD H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS5405480AApr 11, 1995
Induction plasma source
NOVELLUS SYSTEMS INC162 citations99
US6225744B1May 1, 2001
Plasma process apparatus for integrated circuit fabrication having dome-shaped induction coil
NOVELLUS SYSTEMS INC27 citations92
US5605599AFeb 25, 1997
Method of generating plasma having high ion density for substrate processing operation
NOVELLUS SYSTEMS INC18 citations92