Inventor
CHAPEK DAVE
US7 patents
Patents
7 patentsUS6291364B1Sep 18, 2001
Method and apparatus for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC18 citations92
US6423649B2Jul 23, 2002
Method and apparatus for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC17 citations91
US6596651B2Jul 22, 2003
Method for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC11 citations81
US7410911B2Aug 12, 2008
Method for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC0 citations51
US7282457B2Oct 16, 2007
Apparatus for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC0 citations51
US7279435B2Oct 9, 2007
Apparatus for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC0 citations51
US6955996B2Oct 18, 2005
Method for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC0 citations50