Inventor

HERRERA MANUEL J

US8 patents

⚠️ This page may combine multiple inventors who share the name “HERRERA MANUEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

6 patents

US5565071AOct 15, 1996

Integrated sputtering target assembly

APPLIED MATERIALS INC126 citations98

US5487822AJan 30, 1996

Integrated sputtering target assembly

APPLIED MATERIALS INC106 citations97

US5799860ASep 1, 1998

Preparation and bonding of workpieces to form sputtering targets and other assemblies

APPLIED MATERIALS INC56 citations95

US6033483AMar 7, 2000

Electrically insulating sealing structure and its method of use in a high vacuum physical vapor deposition apparatus

APPLIED MATERIALS INC16 citations90

US6436509B1Aug 20, 2002

Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus

APPLIED MATERIALS INC10 citations71

US6821562B2Nov 23, 2004

Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatus

APPLIED MATERIALS INC3 citations60

HONEYWELL INT INC

2 patents

US6494999B1Dec 17, 2002

Magnetron sputtering apparatus with an integral cooling and pressure relieving cathode

HONEYWELL INT INC64 citations95

US6402912B1Jun 11, 2002

Sputtering target assembly

HONEYWELL INT INC16 citations83