Inventor
STRUMPELL MARK H
US7 patents
Patents
7 patentsUS5867202AFeb 2, 1999
Micromechanical devices with spring tips
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US6204085B1Mar 20, 2001
Reduced deformation of micromechanical devices through thermal stabilization
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US6614576B2Sep 2, 2003
Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices
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US7466018B2Dec 16, 2008
MEMS device wafer-level package
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US7226810B2Jun 5, 2007
MEMS device wafer-level package
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US6908791B2Jun 21, 2005
MEMS device wafer-level package
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US6908778B2Jun 21, 2005
Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices
TEXAS INSTRUMENTS INC2 citations61