Inventor

COOPER RICHARD D

US8 patents

⚠️ This page may combine multiple inventors who share the name “COOPER RICHARD D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RAYTECH INNOVATIVE SOLUTIONS I

3 patents

US6899610B2May 31, 2005

Retaining ring with wear pad for use in chemical mechanical planarization

RAYTECH INNOVATIVE SOLUTIONS I19 citations89

US6852020B2Feb 8, 2005

Polishing pad for use in chemical—mechanical planarization of semiconductor wafers and method of making same

RAYTECH INNOVATIVE SOLUTIONS I38 citations89

US6863774B2Mar 8, 2005

Polishing pad for use in chemical-mechanical planarization of semiconductor wafers and method of making same

RAYTECH INNOVATIVE SOLUTIONS I5 citations59

RAYTECH INNOVATIVE SOLUTIONS L

3 patents

US7025668B2Apr 11, 2006

Gradient polishing pad made from paper-making fibers for use in chemical/mechanical planarization of wafers

RAYTECH INNOVATIVE SOLUTIONS L10 citations71

US6979256B2Dec 27, 2005

Retaining ring with wear pad for use in chemical mechanical planarization

RAYTECH INNOVATIVE SOLUTIONS L4 citations59

US6964601B2Nov 15, 2005

Method for securing a polishing pad to a platen for use in chemical-mechanical polishing of wafers

RAYTECH INNOVATIVE SOLUTIONS L0 citations47

ALLOMATIC IND INC

1 patent

US4804466AFeb 14, 1989

Fluid filter with internal spacer

ALLOMATIC IND INC36 citations87

RAYTECH INNOVATION SOLUTIONS L

1 patent

US7037184B2May 2, 2006

Polishing pad for use in chemical-mechanical planarization of semiconductor wafers and method of making same

RAYTECH INNOVATION SOLUTIONS L17 citations77