Inventor

MONTGOMERY CLINT L

US3 patents

Patents

3 patents

US6921721B2Jul 26, 2005

Post plasma clean process for a hardmask

TEXAS INSTRUMENTS INC7 citations67

US6977437B2Dec 20, 2005

Method for forming a void free via

TEXAS INSTRUMENTS INC3 citations57

US7323409B2Jan 29, 2008

Method for forming a void free via

TEXAS INSTRUMENTS INC3 citations55