Inventor
BAER NORMAN
DE10 patents
⚠️ This page may combine multiple inventors who share the name “BAER NORMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
9 patentsUS10031423B2Jul 24, 2018
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH4 citations82
US9316929B2Apr 19, 2016
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH10 citations82
US9671703B2Jun 6, 2017
Optical arrangement, EUV lithography apparatus and method for configuring an optical arrangement
ZEISS CARL SMT GMBH2 citations72
US9207541B2Dec 8, 2015
Arrangement for mirror temperature measurement and/or thermal actuation of a mirror in a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH6 citations72
US9575224B2Feb 21, 2017
Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective
ZEISS CARL SMT GMBH3 citations70
US12571983B2Mar 10, 2026
Optical system, and method for operating an optical system
ZEISS CARL SMT GMBH0 citations52
US10684551B2Jun 16, 2020
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US10317802B2Jun 11, 2019
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US9746778B2Aug 29, 2017
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50