Inventor
NATT OLIVER
DE14 patents
⚠️ This page may combine multiple inventors who share the name “NATT OLIVER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
10 patentsUS9703206B2Jul 11, 2017
Method for operating an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH4 citations83
US10031423B2Jul 24, 2018
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH4 citations82
US9316929B2Apr 19, 2016
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH10 citations82
US9341957B2May 17, 2016
Method for operating an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH2 citations62
US9217931B2Dec 22, 2015
Method for operating an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH2 citations62
US10222704B2Mar 5, 2019
Method for operating an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations51
US10684551B2Jun 16, 2020
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US10317802B2Jun 11, 2019
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US9746778B2Aug 29, 2017
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US9298097B2Mar 29, 2016
Projection exposure apparatus for EUV microlithography and method for microlithographic exposure
ZEISS CARL SMT GMBH0 citations37