Inventor

LIMBACH GUIDO

DE18 patents

⚠️ This page may combine multiple inventors who share the name “LIMBACH GUIDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIMBACH GUIDO

ZEISS CARL SMT GMBH

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

Optical module with a measuring device

Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

Optical element unit for exposure processes

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Method for replacing objective parts

ZEISS CARL SMT AG

Optical element unit for exposure processes

LIMBACH GUIDO

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

SCHWERTNER TILMAN

Optical element unit for exposure processes having sealing element

SOYEZ GUIDO

Lens module comprising at least one exchangeable optical element