Inventor
STICKEL FRANZ-JOSEF
DE15 patents
⚠️ This page may combine multiple inventors who share the name “STICKEL FRANZ-JOSEF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
10 patentsUS10031423B2Jul 24, 2018
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH4 citations82
US9316929B2Apr 19, 2016
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH10 citations82
US11213926B2Jan 4, 2022
Method for polishing a workpiece in the production of an optical element
ZEISS CARL SMT GMBH0 citations54
US10684551B2Jun 16, 2020
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US10317802B2Jun 11, 2019
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US9746778B2Aug 29, 2017
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US11980990B2May 14, 2024
Method for machining a workpiece in the production of an optical element
ZEISS CARL SMT GMBH0 citations47
US10146138B2Dec 4, 2018
Method for producing an optical element for an optical system, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations47
US9921483B2Mar 20, 2018
Surface correction of mirrors with decoupling coating
ZEISS CARL SMT GMBH1 citations46
US10831114B2Nov 10, 2020
Lithography apparatus and method
ZEISS CARL SMT GMBH0 citations42