Inventor
VAN SCHOOT JAN
NL6 patents
Patents
6 patentsUS10031423B2Jul 24, 2018
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH4 citations82
US9316929B2Apr 19, 2016
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH10 citations82
US11327403B2May 10, 2022
Illumination optical system for projection lithography
ZEISS CARL SMT GMBH0 citations56
US10684551B2Jun 16, 2020
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US10317802B2Jun 11, 2019
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50
US9746778B2Aug 29, 2017
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
ZEISS CARL SMT GMBH0 citations50