Inventor
ONO YUKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ONO YUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS6955485B2Oct 18, 2005
Developing method and developing unit
TOKYO ELECTRON LTD17 citations92
US6617095B2Sep 9, 2003
Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist pattern
TOKYO ELECTRON LTD21 citations91
US8353986B2Jan 15, 2013
Substrate processing apparatus
TOKYO ELECTRON LTD15 citations79
US8053180B2Nov 8, 2011
Developing method and developing unit
TOKYO ELECTRON LTD1 citations62
US7857530B2Dec 28, 2010
Developing method and developing unit
TOKYO ELECTRON LTD0 citations51
US7794924B2Sep 14, 2010
Developing method and developing unit
TOKYO ELECTRON LTD0 citations51
US7427168B2Sep 23, 2008
Developing method and developing unit
TOKYO ELECTRON LTD0 citations51