Inventor
HARADA YUKAKO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “HARADA YUKAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
15 patentsUS7304175B2Dec 4, 2007
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
SUMITOMO CHEMICAL CO100 citations97
US7301047B2Nov 27, 2007
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
SUMITOMO CHEMICAL CO57 citations96
US7932334B2Apr 26, 2011
Resin suitable for an acid generator
SUMITOMO CHEMICAL CO26 citations92
US7612217B2Nov 3, 2009
Sulfonium compound
SUMITOMO CHEMICAL CO27 citations92
US7579132B2Aug 25, 2009
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
SUMITOMO CHEMICAL CO27 citations92
US7439006B2Oct 21, 2008
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
SUMITOMO CHEMICAL CO41 citations92
US7262321B2Aug 28, 2007
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
SUMITOMO CHEMICAL CO42 citations92
US7786322B2Aug 31, 2010
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
SUMITOMO CHEMICAL CO12 citations84
US7531686B2May 12, 2009
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
SUMITOMO CHEMICAL CO11 citations84
US7579497B2Aug 25, 2009
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
SUMITOMO CHEMICAL CO10 citations83
US7527910B2May 5, 2009
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
SUMITOMO CHEMICAL CO5 citations63
US7862980B2Jan 4, 2011
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
SUMITOMO CHEMICAL CO2 citations62
US8378016B2Feb 19, 2013
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO0 citations52
US7759045B2Jul 20, 2010
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO0 citations51
US7667050B2Feb 23, 2010
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
SUMITOMO CHEMICAL CO1 citations51