Inventor
POIS HEATH
US12 patents
⚠️ This page may combine multiple inventors who share the name “POIS HEATH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVA MEASURING INSTR INC
8 patentsUS10533961B2Jan 14, 2020
Method and system for non-destructive metrology of thin layers
NOVA MEASURING INSTR INC5 citations82
US12066391B2Aug 20, 2024
Method and system for non-destructive metrology of thin layers
NOVA MEASURING INSTR INC0 citations61
US11668663B2Jun 6, 2023
Method and system for non-destructive metrology of thin layers
NOVA MEASURING INSTR INC0 citations61
US12360063B2Jul 15, 2025
System and method for measuring a sample by x-ray reflectance scatterometry
NOVA MEASURING INSTR INC0 citations59
US11733035B2Aug 22, 2023
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies
NOVA MEASURING INSTR INC0 citations58
US12281893B2Apr 22, 2025
Characterizing and measuring in small boxes using XPS with multiple measurements
NOVA MEASURING INSTR INC0 citations56
US11988502B2May 21, 2024
Characterizing and measuring in small boxes using XPS with multiple measurements
NOVA MEASURING INSTR INC0 citations56
US11874237B2Jan 16, 2024
System and method for measuring a sample by x-ray reflectance scatterometry
NOVA MEASURING INSTR INC0 citations55
KLA TENCOR CORP
4 patentsUS7933026B2Apr 26, 2011
High resolution monitoring of CD variations
KLA TENCOR CORP178 citations98
US7478019B2Jan 13, 2009
Multiple tool and structure analysis
KLA TENCOR CORP225 citations98
US7567351B2Jul 28, 2009
High resolution monitoring of CD variations
KLA TENCOR CORP22 citations92
US8049903B2Nov 1, 2011
High resolution monitoring of CD variations
KLA TENCOR CORP3 citations62